Soft x-ray projection lithography using a 1:1 ring field optical system
نویسندگان
چکیده
منابع مشابه
Soft-x-ray projection lithography
Soft-x-ray projection imaging is demonstrated by the use of 14-nm radiation from a laser plasma source and a single-surface multilayer-coated ellipsoidal condenser. Aberrations in the condenser and the Schwarzschild imaging objective are characterized and correlated with imaging performance. A new Schwarzschild housing, designed for improved alignment stability, is described.
متن کاملPossibilities for projection x-ray lithography using holographic optical elements.
The use of a single flat grazing incidence reflector on which a computer-generated hologram has been written is proposed for projection x-ray lithography.
متن کاملSoft-x-ray projection imaging with a 1:1 ring-field optic.
A molybdenum/silicon multilayer-coated 1:1 ring-field optic with a numerical aperture of 0.0835 is used to carry out soft-x-ray projection imaging with undulator radiation at 12.9 nm. An ideal optic of this type should be able to image 0.1-µm features with a contrast exceeding 90% at this wavelength. The useful resolution of our ring-field optic is experimentally found to be approximately 0.2 µ...
متن کاملOptical klystron FEL scheme for x-ray coherent harmonic generation at ISLF storage ring
The possibility of inserting an optical klystron on the storage ring of an Iranian Light Source Facility as a Synchrotron Radiation Free electron Laser for coherence harmonic generation in the soft x-ray spectrum has been studied. The study has been performed using the 3D FEL simulation code GENESIS 1.3 and in accordance with the available characteristic parameters of ISLF. Different potential ...
متن کاملOptimum driving a Z-pinch for soft X-Ray lasers
A capillary plasma z-pinch as an alternative active medium of soft X-Ray lasers was studied experimentally and theoretically. The theoretical analysis was based on the self consistent solution of the so called “snow plow” model. The dynamics of pinched plasma is determined by the capillary parameters and by the time dependence of electrical current passing through it. The current time dependenc...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
سال: 1991
ISSN: 0734-211X
DOI: 10.1116/1.585315